Committee Draft
Ïã¸ÛÁùºÏ²Ê¿ª½±/CD 13084
Surface chemical analysis — Secondary ion mass spectrometry — Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
Reference number
Ïã¸ÛÁùºÏ²Ê¿ª½±/CD 13084
Edition 3
Committee Draft
Ïã¸ÛÁùºÏ²Ê¿ª½±/CD 13084
90332
A draft is being reviewed by the committee.
Will replace Ïã¸ÛÁùºÏ²Ê¿ª½± 13084:2018

Abstract

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

General information

Got a question?

Check out our Help and Support

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)