International Standard
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Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
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Ïã¸ÛÁùºÏ²Ê¿ª½± 18118:2024
Edition 3
2024-02
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Ïã¸ÛÁùºÏ²Ê¿ª½± 18118:2024
81742
Published (Edition 3, 2024)

Ïã¸ÛÁùºÏ²Ê¿ª½± 18118:2024

Ïã¸ÛÁùºÏ²Ê¿ª½± 18118:2024
81742
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Abstract

This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.

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