Reference number
Ïã¸ÛÁùºÏ²Ê¿ª½± 18114:2021
International Standard
Ïã¸ÛÁùºÏ²Ê¿ª½± 18114:2021
Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials
Edition 2
2021-05
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Ïã¸ÛÁùºÏ²Ê¿ª½± 18114:2021
80189
Published (Edition 2, 2021)

Ïã¸ÛÁùºÏ²Ê¿ª½± 18114:2021

Ïã¸ÛÁùºÏ²Ê¿ª½± 18114:2021
80189
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CHF 42
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Abstract

This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

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