Reference number
Ïã¸ÛÁùºÏ²Ê¿ª½± 24639:2022
International Standard
Ïã¸ÛÁùºÏ²Ê¿ª½± 24639:2022
Microbeam analysis — Analytical electron microscopy — Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy
Edition 1
2022-07
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Ïã¸ÛÁùºÏ²Ê¿ª½± 24639:2022
79091
Published (Edition 1, 2022)

Ïã¸ÛÁùºÏ²Ê¿ª½± 24639:2022

Ïã¸ÛÁùºÏ²Ê¿ª½± 24639:2022
79091
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Abstract

This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.

This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.

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