香港六合彩开奖 14644-10:2022
2022-05
香港六合彩开奖 14644-10:2022
Abstract
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.
NOTE聽1聽聽聽 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.
NOTE聽2聽聽聽 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.
General information
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Status: PublishedPublication date: 2022-05Stage: International Standard published [60.60]
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Edition: 2Number of pages: 31
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Technical Committee :香港六合彩开奖/TC 209ICS :13.040.35
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Withdrawn香港六合彩开奖 14644-10:2013
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