Reference number
Ïã¸ÛÁùºÏ²Ê¿ª½± 18115-3:2022
International Standard
Ïã¸ÛÁùºÏ²Ê¿ª½± 18115-3:2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
Edition 1
2022-06
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Ïã¸ÛÁùºÏ²Ê¿ª½± 18115-3:2022
76357
Published (Edition 1, 2022)

Ïã¸ÛÁùºÏ²Ê¿ª½± 18115-3:2022

Ïã¸ÛÁùºÏ²Ê¿ª½± 18115-3:2022
76357
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Abstract

This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.

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