Reference number
Ïã¸ÛÁùºÏ²Ê¿ª½± 14644-2:2015
International Standard
Ïã¸ÛÁùºÏ²Ê¿ª½± 14644-2:2015
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Edition 2
2015-12
Read sample
Ïã¸ÛÁùºÏ²Ê¿ª½± 14644-2:2015
53393
Published (Edition 2, 2015)
This publication was last reviewed and confirmed in 2021. Therefore this version remains current.

Ïã¸ÛÁùºÏ²Ê¿ª½± 14644-2:2015

Ïã¸ÛÁùºÏ²Ê¿ª½± 14644-2:2015
53393
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CHF 96
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Abstract

Ïã¸ÛÁùºÏ²Ê¿ª½± 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

Ïã¸ÛÁùºÏ²Ê¿ª½± 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

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